Fabrication of amorphous silicon/amorphous silicon germanium NI1PI2N infrared position detectors

ABSTRACT

Amorphous silicon/amorphous silicon germanium NI1PI2N position detectors are fabricated to suppress visible light and increase detection of infrared light. The material of I1 layer is amorphous silicon or amorphous silicon germanium used to absorb visible light, and material of I2 layer is amorphous silicon germanium or amorphous germanium used to absorb infrared light. A suppression of signal due to the absorption of the visible light and amplification of signals due to absorption of the infrared light can be obtained when the NI1P diode is forward biased and the P12N diode is reverse biased. The optical band gap of the 11 and 12 layers can be controlled by the Si/Ge atomic ratio. The suppression of visible light and enhanced detection of infrared light may be tuned by controlling thickness and optical band gaps of the I1 and I2 layers. The amorphous silicon and amorphous silicon germanium layers may be deposited by square-wave modulation at 13.56 MHz.

FIELD OF THE INVENTION

[0001] This invention discloses amorphous silicon/amorphous silicon-germanium NI₁PI₂N used in infrared position detectors, and light-pen based digital boards.

BACKGROUND OF THE INVENTION

[0002] Infrared position detectors currently on the market, primarily consist of PIN diodes made from crystalline silicon. The structure of such detectors is designed chiefly for one-dimensional detection. Infrared detectors built with amorphous silicon or amorphous silicon-germanium alloy, have only a single detection function, detecting infrared, but not position. In 1991, L. C. Kuo et al. used a relatively thicker I layer as the absorption layer to detect infrared light (Materials Research Society Proc. Vol. 219, pp.783-789, 1991). In 1990, JYH-Wong Hong et al. put forward the Avalanche photo diode for use in infrared detectors (IEEE Quantum Electronics, Vol.26, No.2, pp.280-284, 1990). The Avalanche photo diode increases the detection efficiency of the infrared signal using a large reverse bias.

[0003] C. Y. Chen et al. suggested that in NI₁PI₂N infrared detector, the first NIP diode absorbs infrared light, and the second PIN diode amplifies the signal. (Appl. Phys. Lett. Vol.39, No.4, pp.340-342, 1981).

[0004] Although the aforementioned structure of infrared detectors can be used for visible light, using a crystalline silicon PIN to absorb infrared light, neither supports two-dimensional large-scale position detection, nor effectively prohibits visible light signals from being absorbed.

[0005] The infrared detectors that include an amorphous silicon-germanium alloy PINs, designed by L. C. Kuo et al., failed to prohibit visible light absorption and leading to inefficient detection. The Avalanche photo diode put forward by JYH-Wong Hong et al., generates an amplified Avalanche signal under a large reverse bias, can not prohibit visible light from absorption either. Despite possessing a structure similar to that of this invention, the NI₁PI₂N structure suggested by C. Y. Chen et al, follows a different principle and can not prohibit visible light from: absorption, because the front NI₁P diode absorbs infrared light, whereas the rear diode PI₂N amplifies the signal.

SUMMARY OF THE INVENTION

[0006] The primary purpose of the invention is to disclose the amorphous silicon/amorphous silicon-germanium NI₁P₂N used for infrared position detection. The material of the I₁ layer absorbs visible light, and I₂ layer absorbs infrared light. The suppression of the signal due to the absorption of the visible light and the increase in the signal due to the absorption of the infrared light, can be obtained by a NI₁P diode under forward bias and the PI₂N diode under reverse bias.

[0007] The second purpose of the invention is to disclose the manufacture method of amorphous silicon-germanium alloy. It is produced by modulating RF plasma with a square wave pulse and diluting hydrogen.

[0008] The invention can be modified in a number of ways. Illustrative examples are presented.

BRIEF DESCRIPTION OF THE DRAWINGS

[0009] The invention is described with reference to the accompanying Tables and Figures.

[0010] Table 1 specifies the conditions for developing the NI₁PI₂N detector.

[0011]FIG. 1 shows the structural diagram of NI₁PI₂N

[0012]FIG. 2 shows the front and lateral views of the detector

[0013]FIG. 3 is the I-V chart of the detector. (I₁ is 800 Å thick, and its energy gap is 1.42 eV)

[0014] 1. ▪ . . . Id

[0015] 2.  . . . 450 nm

[0016] 3. ▴ . . . 550 nm

[0017] 4. ▾ . . . 650 nm

[0018] 5. ♦ . . . 694 nm

[0019] 6. * . . . 780 nm

[0020]FIG. 4 is the I/W-V chart of the detector. (I₁ is 800 Å thick, and its energy gap is 1.42 eV)

[0021] 2.  . . . 450 nm

[0022] 3. ▴ . . . 550 nm

[0023] 4. ▾ . . . 650 nm

[0024] 5. ♦ . . . 694 nm

[0025] 6. * . . . 780 nm

[0026]FIG. 5 is the I/V chart of the detector. (I₁ is 2,000 Å thick, and its energy gap is 1.42 eV)

[0027] 1. ▪ . . . Id

[0028] 2.  . . . 450 nm

[0029] 3. ▴ . . . 550 nm

[0030] 4. ▾ . . . 650 nm

[0031] 5. ♦ . . . 694 nm

[0032] 6. * . . . 780 nm

[0033]FIG. 6 is the I/W-V chart of the detector. (I₁ is 2,000 Å thick, and its energy gap is 1.42 eV)

[0034] 2.  . . . 450 nm

[0035] 3. ▴ . . . 550 nm

[0036] 4. ▾ . . . 650 nm

[0037] 5. ♦ . . . 694 nm

[0038] 6. * . . . 780 nm

[0039]FIG. 7 is the I/V chart of the detector. (I₁ is 2,000 Å thick; I₂ is 8,000 Å thick)

[0040] 1. ▪ . . . Id

[0041] 2.  . . . 450 nm

[0042] 3. ▴ . . . 550 nm

[0043] 4. ▾ . . . 650 nm

[0044] 5. ♦ . . . 694 nm

[0045] 6. * . . . 780 nm

[0046]FIG. 8 is the I/W-V chart of the detector. (I₁ is 2,000 Å thick; I₂ is 8,000 Å thick)

[0047] 1. ▪ . . . 450 nm

[0048] 2.  . . . 550 nm

[0049] 3. ▴ . . . 650 nm

[0050] 4. ▾ . . . 694 nm

[0051] 5. * . . . 780 nm

[0052]FIG. 9: Spectrum of NI₁PI₂N

[0053] 1. ▪ . . . I₁ is 200 Å thick

[0054] 2. ◯ . . . I₁ is 800 Å thick

[0055] 3. ▴ . . . I₁ is 2,000 Å thick

[0056] Reference Numbers of the Attached Drawings.

[0057]101 . . . N₁: 200 Å

[0058]102 . . . I₁: 200˜2000 Å (1.42 eV or 1.65 eV)

[0059]103 . . . P: 100 Å

[0060]104 . . . I₂: 4000˜8000 Å (1.42 eV)

[0061]105 . . . N₂: 300 Å

[0062]106 . . . Al

[0063]107 . . . ITO(2)

[0064]108 . . . ITO(1)

[0065]201 . . . NI₁PI₂N

[0066]202 . . . glass substrate

[0067]203 . . . resistance layer

DETAILED DESCRIPTION OF THE INVENTION

[0068] This invention discloses the amorphous silicon/amorphous silicon-germanium infrared position detector used for infrared light-pen based digital boards. The structure of the boards involves many materials to support 2-dimensional position detection. As presented in FIG. 1, the position detector featured with glass/ITO(1)/NI₁PI₂N/ITO(2)/Al. A light-penetrating conductible membrane ITO(1) is built on the glass as an infra-resistance layer, and a supra-resistance layer ITO(2) is built on the NI₁PI₂N. Two aluminum(Al) electrodes are applied on both the ITO layer of the infra-resistance layer and that of the supra-resistance layer. These contact electrodes are mutually orthogonal to one another. The Al electrodes yield 2-dimensional position with respect to the x-axis and the y-axis.

[0069]FIG. 2 shows the front and lateral views of the detector. The N layer is 200˜300 Å thick; the I₁ layer is 200˜2,000 Å thick, with an energy gap of 1.42 eV or 1.65 eV; the P layer is 100 Å thick, and the I₂ layer is 4,000˜8,000 Å thick, with an energy gap of 1.42 eV. Many materials are used in the supra-resistance layer and the infra-resistance layer., from which materials such as ITO, TO, μc-Si and poly-Si, can be selected.

[0070] The aforementioned NI₁PI₂N of five amorphous silicon/amorphous silicon-germanium layers, consists of front diodes of NI₁P that absorb visible light and rear diodes Of PI₂N that absorb infrared light. The N layers are made from either phosphorus-doped hydrogenated amorphous silicon or from hydrogenated amorphous silicon germanium alloy. The P layers are made from either boron-doped hydrogenated amorphous silicon or from hydrogenated amorphous silicon-germanium alloy. The I₁ layers are made from either undoped hydrogenated amorphous silicon or from hydrogenated amorphous silicon-germanium alloy. The I₂ layers are made from either undoped hydrogenated amorphous silicon-germanium alloy or from hydrogenated amorphous germanium. The signal can be suppressed by the absorption of visible light and increased by the absorption of infrared light when the front diode is forward biased and the rear diode is under reverse bias.

[0071] The I₁ layer uses amorphous silicon or amorphous silicon-germanium to absorb visible light, and the I₂ layer uses amorphous silicon-germanium or amorphous germanium to absorb infrared light. The efficiency of the suppression of visible light and the detection of infrared signal are enhanced when the NI₁P diode is forward biased and the PI₂N diode is reverse biased.

[0072] This 2-dimensional position detector includes two resistance layers—the supra-resistance layer and the infra-resistance layer, embedded in the structure of the glass/infra-resistance layer/NI₁PI₂N/supra-resistance, in which when the NI₁P diode is forward biased and the PI₂N diode is under reverse bias. The infrared 2-dimensional detector is responsible for prohibiting visible light from absorption and detecting infrared signal. The detection is continuous, requiring no complicated 2-dimensional array.

[0073] The manufacture of NI₁PI₂N infrared detectors involves the following steps. First, deposit a conductible resistance membrane on a glass base. Then, deposit various layers, such as N, I₁, P, I₂ and N by modulating the RF plasma or continuous RF plasma with a pulsing square wave. A supra-electrode layer is finally deposited.

[0074] Another method for forming glass/infra-resistance layer/NI₁PI₂N/supra-resistance layer is as follows. First, deposit an infra-resistance layer on the glass base, and then deposit a layer of conductible resistance membrane. Deposit various layers such as N, I₁, P, I₂ and N, including a supra-electrode layer, by modulating RF plasma or continuous RF plasma with a pulsing square wave. Then, deposit a supra-electrode layer. Finally, form conductors for the supra-electrode and the infra-electrode by photoetching. The materials used for the conductors of the supra-eletrode and the infra-electrode include Al, Ti, Ag epoxy and conductive glue.

[0075] Table 1 lists the conditions for developing NI₁PI₂N infrared detectors. RF plasma is employed to deposit the N layer under conditions of 0.75 torr, 250° C.; an SiH₄ flow rate of 30 sccm, an H₂ flow rate of 75 sccm, a PH₃ rate of 30 sccm; a power of 25W, and a growth rate of 167 Å/min.

[0076] RF plasma is employed deposit to a-SiGe:H layer : under 0.75 torr, 250° C.; an SiH₄ flow rate of 18 sccm, an H₂ flow rate of 130 sccm, a GeH₄ flow rate of 2 sccm, power of 25W, and a growth rate of 176 Å/min.

[0077] RF plasma is employed to deposit a-SiGe:H layer under: 0.75 torr, 250° C.; an SiH₄ flow rate of 8 sccm, an H₂ flow rate of 140 sccm, a GeH₄ flow rate of 2 sccm, a power of 25 W (500 Hz), and a growth rate of 32 Å/min.

[0078] RF plasma is employed to deposit a-SiH layer: under 0.75 torr, 250° C.; an SiH₄ flow rate of 50 sccm, an H₂ flow rate of 200 sccm, a B₂H₆ flow rate of 200 sccm; a power of 25W, and a growth rate of 218 Å/min.

[0079] NI₁PI₂N infrared detectors are produced by modulating RF plasma with a square wave pulse and the diluting hydrogen, NI₁PI₂N infrared detectors accordingly include two diodes, such as NI₁P and PI₂N. NI₁P₂N infrared detectors selectively absorb visible and infrared light: the front diode, NI₁P, absorbs visible light and the rear diode, PI₂N, absorbs infrared. The light source includes both visible and infrared wavelengths. Infrared light can pass through the first diode and arrive at the second diode when the light source irradiate on surface of the NI₁PI₂N infrared detector. The efficiency of prohibiting visible light from absorption and detecting infrared signal are increased when the front diodes NI₁P is forward bised and the rear diode PI₂N is under reverse bias. As shown in FIGS. 3 and 7, the I₁ layer is 800˜2,000 Å thick, with an energy gap of 1.42 eV; the light source is a wavelength of 780 nmLED, and under a reverse bias of −0.5V, the ratio of the photo-electric current to the dark-electric current exceeds 100.

[0080]FIG. 1 illustrates the structure of the position detector; that is glass/infra-resistance layer ITO(1)/NI₁PI₂N/supra-resistance layer ITO(2)/Al. A light-penetrating conductible membrane ITO(1) infra-resistance layer is built on the glass, and a supra-resistance layer ITO(2) is built on the NI₁PI₂N. Two aluminum(Al) electrodes are deposited on both the ITO layer of the infra-resistance layer and the supra-resistance layer, the two electrodes are mutually perpendicular to one another. The Al electrodes yield a 2-dimensional position with respect to the x-axis and the y-axis. FIG. 2 presents the front and lateral views of the detector. Table 1 specifies the conditions for the development of this NI₁PI₂N detector.

[0081] The creative features of this invention are as follows.

[0082] (1) a.—I₁ and I₂ are made either from undoped hydrogenated amorphous silicon or from hydrogenated amorphous silicon-germanium alloy. The energy gap of I₁ can be adjusted by altering the microstructure of the amorphous silicon. The range of the adjustment is 1.5 eV-1.8 eV : If amorphous silicon-germanium alloy is used, the energy gap can be adjusted within a range of 1.1 eV-1.8 eV by changing the amount of incorporated germanium present.

[0083] The energy gap of I₂ can be adjusted in the same way. The energy gap of I₂ generally does not exceed I₁, to suppress visible light and detect infrared signal, and the overall adjustment targets mainly the peak values as-indicated by the spectrum. A large I₁ energy gap does not significantly impact the absorption of infrared light.

[0084]  b—In the N₁I₁P region, the infrared light does not greatly decay.

[0085]  c—The spectrum echo diagram of the objects in FIG. 9 determines primarily the I-V curves of FIGS. 3 and 5 in which I_(d) denotes dark current, and the remaining currents are monochromic photoelectric currents with wavelengths at 450 nm, 550 nm, 650 nm, 694 nm and 780 nm : The film parameter N₁ is 200 Å; I₁ is 800 Å; P is 100 Å; I₂ is 4,000 Å, and N₂ is 300 Å.

[0086] (2) The first diode N₁I₁P is designed to prohibit visible light, and PI₂N is designed to detect infrared light. This invention is significantly different from the NI₁PI₂N designed by C. Y. Chen. et al in 1981, with respect to the design concept and the purpose are concerned. The latter employs one of the diodes for photo-amplification.

[0087] (3) The energy gap of I₁ is typically not less than that of I₂. “Thickness” does not considerably affect infrared absorption.

[0088] (4) Infrared signal can be absorbed by the I₂ layer, after penetrating N₁I₁P, because the energy gaps of the various layers of N₁I₁P layers are greater than that of the I₂ layer (>1.4 eV) such that infrared signal seldom decays in the I₁ layer.

[0089]FIGS. 3 and 8 reveal that under reverse bias, adjusting the thickness parameter I₁, can prohibit visible light from passing. As shown in the I-V chart, the ratio of light-current to dark-current must exceed 10². The ratio unfavorably decreases under a forward bias.

[0090] This invention of involving amorphous silicon/amorphous silicon-germanium NI₁PI₂N, can be applied to light-pen based digital boards as follows.

[0091] (1) The difference between the two currents, derived from the positions of the light pen, is amplified. The design is clear and simple. The pixels are not required, and the design is cheap and practical.

[0092] (2) Currents are generated whenever a light spot is detected. The currents respond to the thin-membrane structure of the amorphous silicon PIN, that is by the photovoltaic effect of a solar cell, rather than by traditional effect of capacitors or the pressure-electric effect.

[0093] Light-pen based digital boards do not constrain the size of the screen, as do the traditional touch panels handwriting. Without contact points on the screen, it is durable over a long period of time. Also note that the built-in microswitch serves merely to enhance the tactile sense.

[0094] (3) The above mentioned idea can be applied to the “laser” light pen, by “remotely pointing” the pen at the screen, as follows the principle of the solar cell, such that the light pen and the screen can interact. The design embodies a completely novel idea. TABLE 1 Conditions for developing this NI₁PI₂N detector. Tem- Pres- per- Growth sure ature Flow ratio RF power Rate (torr) (° C.) (sccm) (W) (A/min) N layer 0.75 250 SiH₄: 30 25 167 H₂: 75 PH₃: 30 a-SiGe:H(1.65 eV) 0.75 250 SiH₄: 18 25 176 H₂: 130 GeH₄: 2 a-SiGe:H(1.42 eV) 0.75 250 SiH₄: 8 25,500 Hz 32 H₂: 140 GeH₄: 2 Player 0.75 250 SiH₄: 50 25 218 H₂: 200 B₂H₆: 200 

1. The amorphous silicon/amorphous silicon-germanium NI₁PI₂N consists of a front diodes of NI₁P, that absorb visible light, and rear diodes of PI₂N that absorb infrared light; the N material is either phosphorus-doped hydrogenated amorphous silicon or hydrogenated amorphous silicon germanium alloy; the P material is either boron-doped hydrogenated amorphous silicon or hydrogenated amorphous silicon-germanium alloy; the I₁ material is either undoped hydrogenated amorphous silicon or hydrogenated amorphous silicon-germanium alloy; the I₂ material is either undoped hydrogenated amorphous silicon-germanium alloy or hydrogenated amorphous germanium.
 2. The 2-dimensional position detector features a glass/infra-resistance layer ITO(1)/NI₁PI₂N/supra-resistance layer ITO(2)/Al structure, and consists of two light-penetrating conductible membrane ITOs, as the infra-resistance layer and the supra-resistance layer of a divided circuit. Front diodes NI₁P absorb visible light, and rear diodes PI₂N absorb infrared light, and Al electrodes serve as the contacts.
 3. In the 2-dimensional position detector, according to claim 2, the material for the supra-resistance layer and the infra-resistance layer, can be arbitrarily selected from ITO, TO, μc-Si or poly-Si.
 4. The method of manufacturing NI₁PI₂N infrared detectors consists of the following steps. Deposit an conductible resistance membrane on a glass base; then, deposit various layers such as N, I₁, P, I₂ and N by modulating RF plasma or continuous RF plasma with a pulsing square wave; finally, a supra-electrode layer is deposited.
 5. The method of producing the glass/infra-resistance layer/NI₁P₂N/supra-resistance infrared position detector is as follows. First, deposit an infra-resistance layer on the glass base, then a layer of conductible resistance membrane; deposit various layers such as N, I₁, P, I₂ and N, including a supra-electrode layer, by modulating RF plasma or continuous RF plasma with a pulsing square wave; then, deposit a supra-electrode layer; finally, produce conductors for the supra-electrode and the infra-electrode by photoetching. The position detector can be used for infrared light-pen based digital boards.
 6. Method of producing glass/infra-resistance layer/NI₁PI₂N/supra-resistance layer. In the infrared position detector, according to claim 5, the material of the supra-resistance layer and the infra-resistance layer, can be arbitrarily chosen from one of the materials such as ITO, TO, μc-Si or poly-Si. 